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1

Boron etch-stop in TMAH solutions

Elin Steinsland, Martin Nese, Anders Hanneborg, Ralph W. Bernstein, Halle Sandmo, Gjermund Kittilsland

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 313 KB

english, 1996

2

Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays

Forsberg, Fredrik, Roxhed, Niclas, Fischer, Andreas C., Samel, Björn, Ericsson, Per, Hoivik, Nils, Lapadatu, Adriana, Bring, Martin, Kittilsland, Gjermund, Stemme, Göran, Niklaus, Frank

Journal:

Infrared Physics & Technology

Year:

2013

Language:

english

File:

PDF, 1.75 MB

english, 2013

3

A silicon sensor for measurement of liquid flow and thickness of fouling biofilms

Manne Stenberg, Göran Stemme, Gjermund Kittilsland, Karsten Pedersen

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 1.95 MB

english, 1988

4

A sub-micron particle filter in silicon

Gjermund Kittilsland, Göran Stemme, Bengt Nordén

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 483 KB

english, 1990

5

A model for the etch-stop location on reverse-biased pn junctions

Daniel Lapadatu, Gjermund Kittilsland, Martin Nese, Svein M. Nilsen, Henrik Jakobsen

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 990 KB

english, 1998

6

An integrated resonant accelerometer microsystem for automotive applications

Per Ohlckers, Reidar Holm, Henrik Jakobsen, Terje Kvisteroy, Gjermund Kittilsland, André Larsen, Martin Nese, Svein M. Nilsen, Alain Ferber

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 626 KB

english, 1998

7

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 29 April 2013)] Infrared Technology and Applications XXXIX - High-performance LWIR microbolometer with Si/SiGe quantum well thermistor and wafer level packaging

Roer, Audun, Lapadatu, Adriana, Wolla, Erik, Kittilsland, Gjermund, Andresen, Bjørn F., Fulop, Gabor F., Hanson, Charles M., Norton, Paul R., Robert, Patrick

Year:

2013

Language:

english

File:

PDF, 1.32 MB

english, 2013

8

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Cu-Sn Wafer Level Bonding for Vacuum Encapsulation of Microbolometer Focal Plane Arrays

Lapadatu, Adriana, Simonsen, Tor Ivar, Kittilsland, Gjermund, Stark, Birger, Hoivik, Nils, Dalsrud, Vegar, Salomonsen, Guttorm

Year:

2010

Language:

english

File:

PDF, 620 KB

english, 2010

9

CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration

Forsberg, Fredrik, Lapadatu, Adriana, Kittilsland, Gjermund, Martinsen, Stian, Roxhed, Niclas, Fischer, Andreas C., Stemme, Goran, Samel, Bjorn, Ericsson, Per, Hoivik, Nils, Bakke, Thor, Bring, Martin

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Year:

2015

Language:

english

File:

PDF, 8.05 MB

english, 2015

10

[IEEE 2010 3rd Electronic System-Integration Technology Conference (ESTC) - Berlin, Germany (2010.09.13-2010.09.16)] 3rd Electronics System Integration Technology Conference ESTC - Fluxless wafer-level Cu-Sn bonding for micro- and nanosystems packaging

Hoivik, Nils, Wang, Kaiying, Aasmundtveit, Knut, Salomonsen, Guttorm, Lapadatu, Adriana, Kittilsland, Gjermund, Stark, Birger

Year:

2010

Language:

english

File:

PDF, 1.05 MB

english, 2010

11

New fluid filter structure in silicon fabricated using a self-aligning technique

G. Stemme, G. Kittilsland

Year:

1988

Language:

english

File:

PDF, 649 KB

english, 1988

12

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - An integrated resonant accelerometer microsystem for automotive applications

Ohlckers, P., Holm, R., Jakobsen, H., Kvisteroy, T., Kittilsland, G., Nese, M., Nilsen, S.M., Ferber, A.

Year:

1997

Language:

english

File:

PDF, 418 KB

english, 1997

13

Leak Rates and Residual Gas Pressure in Cavities Sealed by Metal Thermo-Compression Bonding and Silicon Direct Bonding

Schjolberg-Henriksen, K., Malik, N., Sandvand, A., Kittilsland, G., Moe, S. T.

Journal:

ECS Transactions

Year:

2014

Language:

english

File:

PDF, 524 KB

english, 2014

14

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida (Monday 5 April 2010)] Infrared Technology and Applications XXXVI - High-performance long wave infrared bolometer fabricated by wafer bonding

Lapadatu, Adriana, Kittilsland, Gjermund, Elfving, Anders, Hohler, Erling, Kvisterøy, Terje, Bakke, Thor, Ericsson, Per, Andresen, Bjørn F., Fulop, Gabor F., Norton, Paul R.

Year:

2010

Language:

english

File:

PDF, 1.22 MB

english, 2010

15

[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Boron Etch-stop In TMAH Solutions

Steinsland, E., Nese, M., Hanneborg, A., Bernstein, R.W., Sandmo, H., Kittilsland, G.

Year:

1995

Language:

english

File:

PDF, 351 KB

english, 1995

16

SPIE Proceedings [SPIE SPIE Security + Defence - Prague, Czech Republic (Monday 19 September 2011)] Electro-Optical and Infrared Systems: Technology and Applications VIII - High performance LWIR microbolometer with Si/SiGe quantum well thermistor and wafer level packaging

Roer, Audun, Lapadatu, Adriana, Bring, Martin, Wolla, Erik, Hohler, Erling, Kittilsland, Gjermund

Year:

2011

Language:

english

File:

PDF, 1.68 MB

english, 2011

17

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Sensing and Detection - Low cost, high performance far infrared microbolometer

Roer, Audun, Berghmans, Francis, Mignani, Anna G., Lapadatu, Adriana, Elfving, Anders, van Hoof, Chris A., Kittilsland, Gjermund, Hohler, Erling

Year:

2010

Language:

english

File:

PDF, 1.24 MB

english, 2010

18

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A model for the etch stop location on reversed biased pn junctions

Lapadatu, D., Kittilsland, G., Nese, M., Nilsen, S.M., Jakobsen, H.

Year:

1997

Language:

english

File:

PDF, 338 KB

english, 1997

19

ReviewâMechanical Stress in Chemically Vapor Phase Deposited Boron- and Phosphorus-Contained Silicate Glass Thin Films: A Review

Vasilyev, Vladislav Yu., Kittilsland, Gjermund

Journal:

ECS Journal of Solid State Science and Technology

Year:

2020

File:

PDF, 1.13 MB

2020

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